MEMS sensor. By Debra Vogler, senior technical editor, Small Times November 9, 2009 – HP recently announced an inertial sensing technology that enables the development of digital microelectromechanical systems (MEMS) accelerometers that are up to 1,000× more sensitive than high-volume products currently available.
According to David Erickson, engineering manager in HP’s technology development organization, Imaging and Printing Group, the new sensors based on this technology can achieve noise density performance in the sub-100 nano-g/square root Hz range to enable dramatic improvements in data quality. The MEMS device can be customized with single or multiple axes per chip to meet individual system requirements; its dynamic range is >130dB with a bandwidth of 0-250Hz that is extendible to 10kHz. SMART DUST.