TEMPEST version 5.0. Illumination is assumed to be monochromatic, with the electric field linearly polarized in any user-specified direction.
The incident angle can take on discrete values depending on the illumination wavelength and the dimension of the simulation domain. Illumination is assumed to be coherent and can consist of any intensity and phase profile such as that calculated from SPLAT9 or other computer programs. The photosensitizer concentration is calculated if photoresit is present. The matrix containing this concentration information can be used in other simulation programs such as SAMPLE4 for simulation of resist development.
GRASP Laboratory - University Of Pennsylvania. Path Planning.